时栅角位移传感器误差分离与建模方法研究

Study on the Method of Error Separation and Modeling for Time Grating Angular Displacement Sensor

中文关键词:  时栅  误差分离  误差模型  误差修正

英文关键词:time grating  error separation  error model  error correction

中文摘要:

      为实现时栅角位移传感器的误差分离，进而对其误差进行修正，提高时栅角位移传感器的测量精度，采用多路信号叠加原理，针对时栅角位移传感器的定子和转子在加工过程中存在的误差进行分离，消除了大部分的长周期误差，并对分离出来的误差成分进行谐波分析，建立误差修正模型，利用该模型对时栅角位移传感器的定子和转子的线槽分度误差进行修正，修正后的场式时栅角位移传感器的测量精度显著提高，精度优于±2″。实验证明，这种误差分离的方法对消除圆周分度误差十分有效，所建立的误差修正模型对传感器误差修正效果明显。

英文摘要:

      A method based on the principle of multiple signal superposition is presented to realize the error separation of time grating angular displacement sensors.The measurement accuracy of time grating sensors is improved by correcting the separated errors.Errors caused during manufacturing stators and rotors of time grating angular displacement sensors are separated,and majority long-periodic errors are removed.Thus,error correction model is made by using the harmonic analysis of these separated errors.Indexing errors of wire slots of stators and rotors of time grating sensors are corrected by using this model.The accuracy of the field-type time grating is improved significantly by using the error correction model.The precise is better than ±2″ after calibrating.Experiments prove that the method of error separation is very effective for removing indexing errors,and the effect of the established error correction model is obvious in calibrating errors of time grating angular displacement sensors.